Impact of the sequence of precursor introduction on the growth and properties of atomic layer deposited Al-doped ZnO films

TitleImpact of the sequence of precursor introduction on the growth and properties of atomic layer deposited Al-doped ZnO films
Publication TypeJournal Article
Year of Publication2018
AuthorsLe Tulzo, H, Schneider, N, Lincot, D, Patriarche, G, Donsanti, F
JournalJournal of Vacuum Science & Technology A
Volume36
Issue4
Pagination041502
Date PublishedJan-07-2018
ISSN0734-2101
URLhttp://avs.scitation.org/doi/10.1116/1.5030990http://avs.scitation.org/doi/pdf/10.1116/1.5030990
DOI10.1116/1.5030990
Short TitleJournal of Vacuum Science & Technology A
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